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島根大学総合理工学部紀要. シリーズA Volume 35
published_at 2001-12-24
有機金属気相成長法によるZnO薄膜の成長
The Growth of ZnO Films by Metalorganic Chemical Vapor Deposition
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Zn0 films have been grown by photo−assisted metalorganic chemical vapor deposition with the use of dimethylzinc and diethylether as source materials. The reaction and the decomposition of source materials were observed by in situ measurements of ultraviolet photo-absorption spectra. Specula surface was obtained at the growth temperature of 400～480℃.
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