Nondegenerate Polycrystalline Hydrogen-Doped Indium Oxide (InOx:H) Thin Films Formed by Low-Temperature Solid-Phase Crystallization for Thin Film Transistors

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language	eng
Attribute	Article
Author	Kataoka Taiki Materials Science and Engineering Course, Kochi University of Technology, Kami 782-8502, Kochi, Japan Magari, Yusaku Makino, Hisao Center for Nanotechnology, Research Institute, Kochi University of Technology, Kami 782-8502, Kochi, Japan　/　 Electronic and Photonic Systems Engineering Course, Kochi University of Technology, Kami 782-8502, Kochi, Japan
Journal Title	Materials
Volume	15
Issue	1
ISSN（Online）	1996-1944
Published Date	2021-12-7
DOI	10.3390/ma15010187
PubMed ID	35009333
Publisher	MDPI
NII Type	Journal Article
rights(link)	This work is licensed under a Creative Commons Attribution 4.0 International License.
OAI-PMH Set	Faculty of Science and Engineering