Title Transcription | ヒカリ レイキ ユウキ キンゾク キソウ セイチョウホウ ニヨル ZNSE ノ セイチョウ メカニズム ト ヒカリ ショクバイ コウカ
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Title Alternative (English) | The growth mechanism of ZnSe by photo-assisted metalorganic chemical vapor deposition and photo-sensitization effect
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jpn
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Description | The epitaxial layers of ZnSe have been grown by photo-assisted metalorganic che㎜cal vapor deposi tion with the use of dimethylzinc and dimethylselenide as sourse materials and the growth mechanism has been investigated. The decomposition of source materiais were observed by in site measurements of ultraviolet photo-absorption spectra. The results show that dimethylzinc is decomposed by the reaction with hydrogen molecule and dimethylselenide is decomposed by photo-sensitization effect on the surface of ZnSe. New reaction models are proposed.
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Journal Title |
島根大学総合理工学部紀要. シリーズA
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Volume | 33
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Start Page | 89
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End Page | 99
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ISSN | 13427113
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Published Date | 1999-12-24
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NCID | AA11157087
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Publisher | 島根大学総合理工学部
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Publisher Aalternative | Interdisciplinary Faculty of Science and Engineering, Shimane University
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NII Type |
Departmental Bulletin Paper
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OAI-PMH Set |
Interdisciplinary Graduate School of Science and Engineering
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Remark | 30-41+ / 1997-2007
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他の一覧 |