| File | |
| Title ( jpn ) |
Atomic Scale Insights into Si Transport Pathway in Si-oxide Film Based on Theoretical Investigation of Medium Density Effects
|
| Creator |
Akiyama Toru
Graduate School of Engineering, Mie University
Shiraishi Kenji
Institute of Materials and Systems for Sustainability, Nagoya University / Graduate School of Engineering, Nagoya University
|
| Source Title |
e-Journal of Surface Science and Nanotechnology
|
| Volume | 23 |
| Issue | 3 |
| Start Page | 306 |
| End Page | 313 |
| Journal Identifire |
PISSN 1348-0391
|
| Language |
eng
|
| Resource Type | journal article |
| Publisher |
The Japan Society of Vacuum and Surface Science
|
| Date of Issued | 2025-07-17 |
| 権利関係（リンク） | Atomic Scale Insights into Si Transport Pathway in Si-oxide Film Based on Theoretical Investigation of Medium Density Effects © 2025 by Kageshima Hiroyuki / Akiyama Toru / Shiraishi Kenji is licensed under CC BY 4.0  |
| Publish Type | Version of Record |
| Access Rights | open access |
| Relation |
[DOI]
10.1380/ejssnt.2025-043
|
