Bismuth-assisted low-temperature growth of flexible GaSb thin films by multi-cathode RF magnetron sputtering

Journal of Materials Science Volume 58 Page 11174-11186 published_at 2023-07-05
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Title ( eng )
Bismuth-assisted low-temperature growth of flexible GaSb thin films by multi-cathode RF magnetron sputtering
Creator
Nishimoto Naoki Department of Research Planning and Coordination, Shimane Institute for Industrial Technology, 1 Hokuryo, Matsue, Shimane 690-0816, Japan
Source Title
Journal of Materials Science
Volume 58
Start Page 11174
End Page 11186
Journal Identifire
PISSN 0022-2461
EISSN 1573-4803
Language
eng
Resource Type journal article
Publisher
Springer Nature
Date of Issued 2023-07-05
Publish Type Accepted Manuscript
Access Rights open access
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