Defect Passivation and Carrier Reduction Mechanisms in Hydrogen-Doped In-Ga-Zn-O (IGZO:H) Films upon Low-Temperature Annealing for Flexible Device Applications

Materials Volume 15 Issue 1 published_at 2022-1-3
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Title
Defect Passivation and Carrier Reduction Mechanisms in Hydrogen-Doped In-Ga-Zn-O (IGZO:H) Films upon Low-Temperature Annealing for Flexible Device Applications
Creator
Rostislav Velichko
Furuta Mamoru
Source Title
Materials
Volume 15
Issue 1
Journal Identifire
EISSN 1996-1944
Language
eng
Resource Type journal article
Publisher
MDPI
Date of Issued 2022-1-3
権利関係(リンク) Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.
Access Rights metadata only access
Relation
[DOI] 10.3390/ma15010334