水素イオンを注入したゲルマニウムのDLTS測定

島根大学理学部紀要 Volume 17 Page 23-30 published_at 1983-12-25
アクセス数 : 1453
ダウンロード数 : 63

今月のアクセス数 : 68
今月のダウンロード数 : 1
File
c0010017r004.pdf 1.09 MB エンバーゴ : 2001-09-29
Title
水素イオンを注入したゲルマニウムのDLTS測定
Title
DLTS Measurements on Hydrogen Implanted Germanium
Title Transcription
スイソ イオン オ チュウニュウシタ ゲルマニウム ノ DLTS ソクテイ
Creator
Ito Kazuyoshi
Ito Takashi
Corbett James W.
Source Title
島根大学理学部紀要
Memoirs of the Faculty of Science, Shimane University
Volume 17
Start Page 23
End Page 30
Journal Identifire
ISSN 03879925
Descriptions
Deep levels introduced by 50 KeV hydrogen ions or 1.5 MeV electrons in undoped germanium have been studied using deep level transient spectroscopy. Five hole traps have been observed after implantation. The energy levels associated with these traps, their cross sections and their annealing behaviours have been determined. The two trap levels at E_v + 0.38 eV and at E_v +0.42 eV annealed at the same temperature, and they are attributable to the defect levels associated with divacancy-hydrogen complex.
Language
eng
Resource Type departmental bulletin paper
Publisher
島根大学理学部
The Faculty of Science, Shimane University
Date of Issued 1983-12-25
Access Rights open access
Relation
[NCID] AN00108106