Speciation analysis of inorganic Sb leached from InSb thin films by hydride generation–microwave plasma-atomic emission spectroscopy

Journal of the Iranian Chemical Society Volume 370 Page 2555-2560 published_at 2023-06-09
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Title
Speciation analysis of inorganic Sb leached from InSb thin films by hydride generation–microwave plasma-atomic emission spectroscopy
Creator
Nishimoto Naoki
Source Title
Journal of the Iranian Chemical Society
Volume 370
Start Page 2555
End Page 2560
Journal Identifire
ISSN 1735-207X
EISSN 1735-2428
Language
eng
Resource Type journal article
Publisher
Iranian Chemical Society
Date of Issued 2023-06-09
Publish Type Accepted Manuscript
Access Rights open access
Relation
[DOI] 10.1007/s13738-023-02853-3