High-mobility hydrogenated polycrystalline In2O3 (In2O3:H) thin-film transistors

Nature Communications Volume 13 published_at 2022-02-28
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Title
High-mobility hydrogenated polycrystalline In2O3 (In2O3:H) thin-film transistors
Creator
Kataoka Taiki
Furuta Mamoru
Source Title
Nature Communications
Volume 13
Journal Identifire
EISSN 2041-1723
Language
eng
Resource Type journal article
Publisher
Springer Nature Limited
Date of Issued 2022-02-28
権利関係(リンク) Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.
Access Rights metadata only access
Relation
[DOI] 10.1038/s41467-022-28480-9