Variation in electrical and structural properties of Ga-doped ZnO films caused by oxygen out-diffusion

Transactions of the Materials Research Society of Japan Volume 46 Issue 1 Page 33-37 published_at 2021-05-01
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Title
Variation in electrical and structural properties of Ga-doped ZnO films caused by oxygen out-diffusion
Creator
Sugiura Rei
Source Title
Transactions of the Materials Research Society of Japan
Volume 46
Issue 1
Start Page 33
End Page 37
Journal Identifire
ISSN 1382-3469
EISSN 2188-1650
Language
eng
Resource Type journal article
Publisher
一般社団法人 日本MRS
The Materials Research Society of Japan
Date of Issued 2021-05-01
Access Rights metadata only access
Relation
[DOI] 10.14723/tmrsj.46.33
イッパン シャダン ホウジン ニホン エムアールエス