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言語
英語
著者
内容記述(抄録等)
As-grown and annealed samples of InAs layers grown by MBE at 150-350℃ were characterized by electron probe microanalysis (EPMA), high resolution X-ray diffraction (HRXRD), Hall measurements, and secondary ion mass spectrometry (SIMS). EPMA revealed that the As mole fractions in the layers grown at 150-200 ℃ are higher by about 0.5 % than those in the layers grown at 300-350 ℃. HRXRD measurements revealed that the layers grown at 150-200 ℃ have larger lattice spacings than the InAs substrate by about 0.02 %. Hall measurements revealed that the free-electron concentration in the layer grown at 200 ℃ is as high as 1.4×10^<19> cm^<-3> while such a high concentration of impurities cannot be detected by SIMS. Upon annealing at higher temperatures than 250 ℃, both the lattice spacing and the free-electron concentration of the layer grown at 200 ℃ were observed to decrease. These phenomena can be reasonably attributed to antisite As.
主題
Semiconducting III-V materials
Molecular beam epitaxy
Point defects
掲載誌名
Journal of crystal growth
301-302
開始ページ
256
終了ページ
259
ISSN
00220248
発行日
2006
DOI
DOI公開日
2013-04-01
NCID
AA00696341
出版者
Elsevier
DCMI
text
資料タイプ
学術雑誌論文
ファイル形式
PDF
権利関係
Copyright c 2006 Elsevier B.V. All rights reserved
著者版/出版社版
著者版
業績ID
e19781
部局
(旧組織)大学院総合理工学研究科
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