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Title Transcription
ヒカリ レイキ ユウキ キンゾク キソウ セイチョウホウ ニヨル ZNSE ノ セイチョウ メカニズム ト ヒカリ ショクバイ コウカ
Title Alternative (English)
The growth mechanism of ZnSe by photo-assisted metalorganic chemical vapor deposition and photo-sensitization effect
File
language
jpn
Author
Description
The epitaxial layers of ZnSe have been grown by photo-assisted metalorganic che㎜cal vapor deposi tion with the use of dimethylzinc and dimethylselenide as sourse materials and the growth mechanism has been investigated. The decomposition of source materiais were observed by in site measurements of ultraviolet photo-absorption spectra. The results show that dimethylzinc is decomposed by the reaction with hydrogen molecule and dimethylselenide is decomposed by photo-sensitization effect on the surface of ZnSe. New reaction models are proposed.
Journal Title
島根大学総合理工学部紀要. シリーズA
Volume
33
Start Page
89
End Page
99
ISSN
13427113
Published Date
1999-12-24
NCID
AA11157087
Publisher
島根大学総合理工学部
Publisher Aalternative
Interdisciplinary Faculty of Science and Engineering, Shimane University
NII Type
Departmental Bulletin Paper
OAI-PMH Set
Interdisciplinary Graduate School of Science and Engineering
Remark
30-41+ / 1997-2007
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